Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)Proceeding EI 
                        
                            刊物类型:Proceeding
                            ISSN:10846999
                            EISSN:-
                            出版商:Institute of Electrical and Electronics Engineers Inc.
                            国家:United States
                            学科1:Electrical and Electronic Engineering
                            学科2:Mechanical Engineering
                            学科3:Electronic, Optical and Magnetic Materials
                            是否开放:-